Johan Schabbink - Design of a Capacitive based Closed-Loop Displacement Sensor: Conceptual design of a MEMS displacement sensor smaller than 1x1 mm with a resolution of 1 nanometer

Brand : LAP Lambert Academic Publishing, Binding : Taschenbuch, Label : LAP LAMBERT Academic Publishing, Publisher : LAP LAMBERT Academic Publishing, medium : Taschenbuch, numberOfPages : 80, publicationDate : 2012-05-04, authors : Johan Schabbink, ISBN : 3659107948 ...